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The science and engineering of microelectronic fabrication / Stephen A. Campbell.

By: Material type: TextTextPublication details: New York : Oxford University Press, 2001.Edition: 2nd edDescription: xiv, 603 p. : ill. ; 24 cmISBN:
  • 0195136055
Subject(s): DDC classification:
  • 621.38152
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Books Books Department of Instrumentation Library General Stacks 621.38152 (Browse shelf(Opens below)) Available DOI2268
Total holds: 0

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