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The science and engineering of microelectronic fabrication / (Record no. 1778)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01338cam a22003014a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20210315100425.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 001005s2001 nyua b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0195136055 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A., |
| 245 14 - TITLE STATEMENT | |
| Title | The science and engineering of microelectronic fabrication / |
| Statement of responsibility, etc | Stephen A. Campbell. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York : |
| Name of publisher, distributor, etc | Oxford University Press, |
| Date of publication, distribution, etc | 2001. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 603 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Unit Process, Chemical Vapor Deposition |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| item type | Books |
| Lost status | Source of classification or shelving scheme | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | Department of Instrumentation Library | Department of Instrumentation Library | General Stacks | 03/15/2021 | 621.38152 | DOI2268 | 03/15/2021 | 03/15/2021 | Books |