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The science and engineering of microelectronic fabrication /
Campbell, Stephen A.,
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, 2001. - xiv, 603 p. : ill. ; 24 cm.
0195136055
Unit Process, Chemical Vapor Deposition
621.38152
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, 2001. - xiv, 603 p. : ill. ; 24 cm.
0195136055
Unit Process, Chemical Vapor Deposition
621.38152