| 000 | 01338cam a22003014a 4500 | ||
|---|---|---|---|
| 999 |
_c1778 _d1778 |
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| 005 | 20210315100425.0 | ||
| 008 | 001005s2001 nyua b 001 0 eng | ||
| 020 | _a0195136055 | ||
| 082 | 0 | 0 | _a621.38152 |
| 100 | 1 | _aCampbell, Stephen A., | |
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell. |
| 250 | _a2nd ed. | ||
| 260 |
_aNew York : _bOxford University Press, _c2001. |
||
| 300 |
_axiv, 603 p. : _bill. ; _c24 cm. |
||
| 653 | _aUnit Process, Chemical Vapor Deposition | ||
| 942 | _cBK | ||