000 nam a22 7a 4500
999 _c1458
_d1458
005 20210302124416.0
008 210302b ||||| |||| 00| 0 eng d
020 _a9780849317385
082 _a621.395
245 _aVLSI Technology
250 _aEdited by Wai-Kai Chen
260 _aBoca Raton
_bCRC Press
300 _a17.26p.
653 _aMicromachining, Microelectronics Packaging, SiC Technology, Passive Components, Multichip Module Technologies
942 _cBK