| 000 | nam a22 7a 4500 | ||
|---|---|---|---|
| 999 |
_c1437 _d1437 |
||
| 005 | 20210302110711.0 | ||
| 008 | 210302b ||||| |||| 00| 0 eng d | ||
| 020 | _a9783527310807 | ||
| 082 | _a621.3815 | ||
| 245 |
_aAdvanced Micro & Nanosystems _bCMOS-MEMS |
||
| 250 | _aEditors O Brand & G K Fedder | ||
| 260 |
_aGermany _bWILEY-VCH |
||
| 300 | _a594p. | ||
| 490 | _vVolume 2 | ||
| 653 | _aFabrication Technology, Monolithically Integrated Inertial Sensors, RF CMOS MEMS, Biometric Capacitive CMOS Fingerprint Sensor Systems | ||
| 942 | _cBK | ||