| 000 | nam a22 7a 4500 | ||
|---|---|---|---|
| 999 |
_c1414 _d1414 |
||
| 005 | 20210301154505.0 | ||
| 008 | 210301b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780849328381 | ||
| 082 | _a621.381 | ||
| 100 | _aLyshevski, Sergey Edward | ||
| 245 |
_aNano-and Micro-Electromechanical Systems _bFundamentals of Nano-and Microengineering |
||
| 260 |
_aBoca Raton _bCRC Press |
||
| 300 | _a722p. | ||
| 490 | _aNano-and Microscience, Engineering, Technology, and Medicine Series | ||
| 653 | _aNano-and Microscale Systems, NEMS and MEMS, Radial Topology, Quantum Mechanics, Molecular, Carbon Nanoelectronics, Control of MEMS and NEMS | ||
| 942 | _cBK | ||