| 000 | nam a22 7a 4500 | ||
|---|---|---|---|
| 999 |
_c1411 _d1411 |
||
| 005 | 20210301153314.0 | ||
| 008 | 210301b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780471201694 | ||
| 082 | _a621.381 | ||
| 100 | _aRebeiz, M Gabriel | ||
| 245 |
_aRF MEMS _bTheory, Design, and Technology |
||
| 260 |
_aNew York _bJohn Wiley & Sons |
||
| 300 | _a483p. | ||
| 653 | _aMechanical Modeling of MEMS, Statics of Analysis, Dynamic Analysis, Electromagnetic Modeling of MEMS Switches, MEMS Switch Library, MEMS Switch Fabrication and Packaging | ||
| 942 | _cBK | ||