| 000 | nam a22 7a 4500 | ||
|---|---|---|---|
| 999 |
_c1369 _d1369 |
||
| 005 | 20210301105236.0 | ||
| 008 | 210301b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780849380693 | ||
| 082 | _a620.5 | ||
| 100 | _aJha, A R | ||
| 245 | _aMEMS and nanotechnology-Based Sensors and devices for Communications, Medical and Aerospace Applications | ||
| 260 |
_aBoca Raton _bCRC Press |
||
| 300 | _a401p. | ||
| 653 | _aMEMS, Potential Actuation Mechanisms, Pull-In Voltage, Pull-Out Voltage, VCAM Performance | ||
| 942 | _cBK | ||