000 nam a22 7a 4500
999 _c1369
_d1369
005 20210301105236.0
008 210301b ||||| |||| 00| 0 eng d
020 _a9780849380693
082 _a620.5
100 _aJha, A R
245 _aMEMS and nanotechnology-Based Sensors and devices for Communications, Medical and Aerospace Applications
260 _aBoca Raton
_bCRC Press
300 _a401p.
653 _aMEMS, Potential Actuation Mechanisms, Pull-In Voltage, Pull-Out Voltage, VCAM Performance
942 _cBK