| 000 | nam a22 7a 4500 | ||
|---|---|---|---|
| 999 |
_c1333 _d1333 |
||
| 005 | 20210227145237.0 | ||
| 008 | 210227b ||||| |||| 00| 0 eng d | ||
| 020 | _a9789812705426 | ||
| 082 | _a608.001 | ||
| 245 |
_aNanofabrication _bFundamentals and Applications |
||
| 250 | _aEdited by Ampere A Tseng | ||
| 260 |
_aNew Jersy _bWorld Scientific |
||
| 300 | _a574p. | ||
| 653 | _aElectron Beam Direct Writing, Focused Ion Beams, Interaction with Solids, Electron Projection Lithography | ||
| 942 | _cBK | ||