Hsu Tai-Ran <br/><br/>
MEMS & Microsystems  Design and Manufacture 

 - New Delhi  McGraw Hill Company 
 - 436p. 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Index Terms: </label>Microsensors, Scaling, Substraters and Wafers, Photolithography 
<br/><br/><label>Dewey Class. No.: </label>621.381