CHANG LIU <br/><br/>
FOUNDATIONS OF MEMS 

 - 2 
 - CHENNAI  PEARSON  2018 
 - 576p. 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Index Terms: </label>INTRODUCTION TO MICROFABRICATION ESSENCIAL ELECTRICAL AND MECHANICAL CONCEPTS ELECTROSTATIC SENSING AND ACTUATION 
<br/><br/><label>Dewey Class. No.: </label>621.3  / LIC/F