TY  - BOOK
AU  - SERQEY  EDWARD LYSHEVSKI
TI  - MEMS AND NEMS SYSTEMS , DEVICES , AND STRUCTURES
SN  - 9780849312625
U1  - 621.381 
PY  - 2002///
CY  - FLORIDA
PB  - CRC PRESS
KW  - new trends in engineering and science
KW  - fundamentals of mems fabrication
KW  - devising and syntheisis of mems and nems
ER  -