SERQEY  EDWARD LYSHEVSKI <br/><br/>
MEMS AND NEMS SYSTEMS , DEVICES , AND STRUCTURES 

 - FLORIDA  CRC PRESS  2002 
 - 461p. 
<br/><br/><label>ISBN: </label>9780849312625 
<br/><br/><label>Subjects--Index Terms: </label>new trends in engineering and science fundamentals of mems fabrication devising and syntheisis of mems and nems 
<br/><br/><label>Dewey Class. No.: </label>621.381  / LYS/M