TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS & MICROSYSTEMS: Design and Manufacture
SN  - 978007048093
U1  - 621.381 
CY  - New Delhi
PB  - McGraw Hill Education Pvt Ltd
KW  - Microsystems Design, Microsystem Fabrication Process, Scaling Laws in Miniaturization, Working Principles of Microsystems
ER  -