Campbell, Stephen A., <br/><br/>
The science and engineering of microelectronic fabrication / 
Stephen A. Campbell. 
 - 2nd ed. 
 - New York :  Oxford University Press,  2001. 
 - xiv, 603 p. :  ill. ;  24 cm. 
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Index Terms: </label>Unit Process, Chemical Vapor Deposition 
<br/><br/><label>Dewey Class. No.: </label>621.38152