TY  - BOOK
AU  - Fujita, H
AU  - Fujita,Hiroyuki
TI  - Micromachines as tools for nanotechnology
T2  - Microtechnology and MEMS
SN  - 354000856X (alk. paper)
U1  - 620.5 
PY  - 2003///
CY  - Berlin, New York
PB  - Springer
KW  - Micromachining Tools for Nanosystems, Microsystems for Single-Molecule Handling and Modification, Manipulation of Single DNA Molecules, Optics in Biology
N1  - With 183 Figures
ER  -