TY  - BOOK
TI  - Microlithography: Science and Technology
SN  - 9780824790240
U1  - 621.381531 
CY  - Boca Raton
PB  - CRC Press
KW  - Metrology and Nanolithography, Resists and Processing, Exposure System
N1  - Edited by Kazuaki Suzuki & Bruce W Smith
ER  -