TY  - BOOK
AU  - Lyshevski, Sergey Edward
TI  - Nano-and Micro-Electromechanical Systems: Fundamentals of Nano-and Microengineering
T2  - Nano-and Microscience, Engineering, Technology, and Medicine Series
SN  - 9780849328381
U1  - 621.381 
CY  - Boca Raton
PB  - CRC Press
KW  - Nano-and Microscale Systems, NEMS and MEMS, Radial Topology, Quantum Mechanics, Molecular, Carbon Nanoelectronics, Control of MEMS and NEMS
ER  -