Rebeiz, M Gabriel <br/><br/>
RF MEMS  Theory, Design, and Technology 

 - New York  John Wiley & Sons 
 - 483p. 
<br/><br/><label>ISBN: </label>9780471201694 
<br/><br/><label>Subjects--Index Terms: </label>Mechanical Modeling of MEMS, Statics of Analysis, Dynamic Analysis, Electromagnetic Modeling of MEMS Switches, MEMS Switch Library, MEMS Switch Fabrication and Packaging 
<br/><br/><label>Dewey Class. No.: </label>621.381