TY  - BOOK
AU  - Jha, A R
TI  - MEMS and nanotechnology-Based Sensors and devices for Communications, Medical and Aerospace Applications
SN  - 9780849380693
U1  - 620.5 
CY  - Boca Raton
PB  - CRC Press
KW  - MEMS, Potential Actuation Mechanisms, Pull-In Voltage, Pull-Out Voltage, VCAM Performance
ER  -