Jha, A R <br/><br/>
MEMS and nanotechnology-Based Sensors and devices for Communications, Medical and Aerospace Applications 

 - Boca Raton  CRC Press 
 - 401p. 
<br/><br/><label>ISBN: </label>9780849380693 
<br/><br/><label>Subjects--Index Terms: </label>MEMS, Potential Actuation Mechanisms, Pull-In Voltage, Pull-Out Voltage, VCAM Performance 
<br/><br/><label>Dewey Class. No.: </label>620.5