Nanofabrication   Fundamentals and Applications 

 - Edited by Ampere A Tseng 
 - New Jersy  World Scientific 
 - 574p. 
<br/><br/><label>ISBN: </label>9789812705426 
<br/><br/><label>Subjects--Index Terms: </label>Electron Beam Direct Writing, Focused Ion Beams, Interaction with Solids, Electron Projection Lithography 
<br/><br/><label>Dewey Class. No.: </label>608.001