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Sub-Half-Micron Lithography for ULSIs

Material type: TextTextPublication details: New York Cambridge University PressEdition: Edited by Katsumi SuzukiDescription: 323pISBN:
  • 9780521570800
Subject(s): DDC classification:
  • 621.395
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Books Books Department of Instrumentation Library Reference 621.395 (Browse shelf(Opens below)) Available DOI1421
Total holds: 0

Edited by Shinji Matsui & Yukinori Ochiai

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Cochin University of Science and Technology, Kochi, Kerala