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Microlithography Science and Technology

Material type: TextTextPublication details: Boca Raton CRC PressEdition: 2nd edDescription: 848pISBN:
  • 9780824790240
Subject(s): DDC classification:
  • 621.381531
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Books Books Department of Instrumentation Library Reference 621.381531 (Browse shelf(Opens below)) Available DOI2184
Total holds: 0

Edited by Kazuaki Suzuki & Bruce W Smith

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Cochin University of Science and Technology, Kochi, Kerala