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MEMS & Microsystems

Hsu Tai-Ran

MEMS & Microsystems Design and Manufacture - New Delhi McGraw Hill Company - 436p.

ISBN: 9780070487093

Subjects--Index Terms: Microsensors, Scaling, Substraters and Wafers, Photolithography

Dewey Class. No.: 621.381

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MEMS & Microsystems