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FOUNDATIONS OF MEMS

CHANG LIU

FOUNDATIONS OF MEMS - 2 - CHENNAI PEARSON 2018 - 576p.

ISBN: 9788131764756

Subjects--Index Terms: INTRODUCTION TO MICROFABRICATION ESSENCIAL ELECTRICAL AND MECHANICAL CONCEPTS ELECTROSTATIC SENSING AND ACTUATION

Dewey Class. No.: 621.3 / LIC/F

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FOUNDATIONS OF MEMS