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MEMS AND NEMS SYSTEMS , DEVICES , AND STRUCTURES

SERQEY EDWARD LYSHEVSKI

MEMS AND NEMS SYSTEMS , DEVICES , AND STRUCTURES - FLORIDA CRC PRESS 2002 - 461p.

ISBN: 9780849312625

Subjects--Index Terms: new trends in engineering and science fundamentals of mems fabrication devising and syntheisis of mems and nems

Dewey Class. No.: 621.381 / LYS/M

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MEMS AND NEMS SYSTEMS , DEVICES , AND STRUCTURES