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MEMS & MICROSYSTEMS Design and Manufacture

Hsu, Tai-Ran

MEMS & MICROSYSTEMS Design and Manufacture - New Delhi McGraw Hill Education Pvt Ltd - 436p.

ISBN: 978007048093

Subjects--Index Terms: Microsystems Design, Microsystem Fabrication Process, Scaling Laws in Miniaturization, Working Principles of Microsystems

Dewey Class. No.: 621.381 / HSU/M

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MEMS & MICROSYSTEMS Design and Manufacture