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MEMS and nanotechnology-Based Sensors and devices for Communications, Medical and Aerospace Applications

Jha, A R

MEMS and nanotechnology-Based Sensors and devices for Communications, Medical and Aerospace Applications - Boca Raton CRC Press - 401p.

ISBN: 9780849380693

Subjects--Index Terms: MEMS, Potential Actuation Mechanisms, Pull-In Voltage, Pull-Out Voltage, VCAM Performance

Dewey Class. No.: 620.5

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MEMS and nanotechnology-Based Sensors and devices for Communications, Medical and Aerospace Applications