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Nanofabrication

Nanofabrication Fundamentals and Applications - Edited by Ampere A Tseng - New Jersy World Scientific - 574p.

ISBN: 9789812705426

Subjects--Index Terms: Electron Beam Direct Writing, Focused Ion Beams, Interaction with Solids, Electron Projection Lithography

Dewey Class. No.: 608.001

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Nanofabrication